Enhancing Materials and Device Analysis Capability in the SEM and FIB-SEM by using a Nanomanipulator
نویسندگان
چکیده
Nanomanipulators, whilst commonly used to lift out TEM samples prepared in the FIB, have a number of other potential applications and can aid in the chemical and crystallographic analysis of samples. Here, we discuss some of these alternative uses of nanomanipulators and show how they enable the EDS and EBSD analysis of thin samples in the FIB-SEM as well as serve as electrical probes and enable charge dissipation on uncoated samples.
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